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CVD-SiC

Purity 99.999%+ (5N–6N)
Bulk Density 3.21 g/cm³
Hardness > 2,500 Hv
Thermal Conductivity 200 ~ 400 W/m·K
Thermal Expansion 4–5 × 10⁻⁶/°C
Young’s Modulus > 400 GPa
Flexural Strength > 240 MPa
Resistivity < 0.02 / 1–25 / > 100 Ω·cm
CVD-SiC
High-Purity CVD Silicon Carbide for Semiconductor Applications

CVD-SiC (Chemical Vapor Deposition Silicon Carbide) is a high-purity SiC material manufactured through a CVD process, offering high hardness and mechanical strength as well as excellent thermal and corrosion resistance.

These properties make CVD-SiC suitable for semiconductor applications and other demanding environments requiring high-temperature stability and high material purity.

Truly supplies CVD-SiC products in various forms to meet specific customer requirements. Our integrated supply capability covers the entire process from raw material supply and precision machining to finished component manufacturing, providing customized solutions based on customer drawings and specifications.

Key Features
● Ultra-High-Purity CVD-SiC
● High Hardness & Mechanical Strength
● Excellent High-Temperature Resistance
● Excellent Corrosion Resistance
● High Thermal Conductivity
● Various Resistivity Options
● Customized Sizes & Specifications


Product Types
─ CVD-SiC Ring Plate
Available in various resistivity, diameter, and thickness specifications, with customized processing available according to customer requirements.

─ CVD-SiC Disc Plate
High-purity CVD-SiC disc material available in various dimensions and thickness specifications.

Customized CVD-SiC Components
Precision-machined CVD-SiC components are available according to customer drawings and specific process requirements.

Key Applications
● Semiconductor Process Components
● CVD-SiC Ring / Plate
● CVD-SiC Disc
● High-Temperature & Corrosive Environment Components
● Customized CVD-SiC Components

Truly provides an integrated CVD-SiC solution covering raw material supply, precision machining, and finished component manufacturing, delivering high-quality and customized products for advanced semiconductor applications.